Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?

Taku Iwase; Yoshito Kamaji; Song Yun Kang; Kazunori Koga; Nobuyuki Kuboi; Moritaka Nakamura; Nobuyuki Negishi; Tomohiro Nozaki; Shota Nunomura; Daisuke Ogawa; Mitsuhiro Omura; Tetsuji Shimizu; Kazunori Shinoda; Yasushi Sonoda; Haruka Suzuki; Kazuo Takahashi; Takayoshi Tsutsumi; Kenichi Yoshikawa; Tatsuo Ishijima; Kenji Ishikawa

doi:10.7567/1347-4065/ab163a

Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Electronic Devices

Research output: Contribution to journal › Review article › peer-review

7 Citations (Scopus)

Abstract

The non-thermal nature of chemical reactions in plasma chemistry is considered to be suitable for next-generation energy production from plasma-material syntheses and renewable sources. As emerging multidisciplinary applications, plasma medicine and plasma agriculture are currently topical applications that make use of atmospheric pressure plasmas. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes with regard to atmospheric pressure plasma technologies as well as material synthesis and thin-film deposition. In this review, selected breakthroughs are reviewed. Finally, near-future major challenges are addressed to encourage new multidisciplinary research across the plasma science and technology community.

Original language	English
Article number	SE0803
Journal	Japanese journal of applied physics
Volume	58
Issue number	SE
DOIs	https://doi.org/10.7567/1347-4065/ab163a
Publication status	Published - 2019

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.7567/1347-4065/ab163a

Cite this

Iwase, T., Kamaji, Y., Kang, S. Y., Koga, K., Kuboi, N., Nakamura, M., Negishi, N., Nozaki, T., Nunomura, S., Ogawa, D., Omura, M., Shimizu, T., Shinoda, K., Sonoda, Y., Suzuki, H., Takahashi, K., Tsutsumi, T., Yoshikawa, K., Ishijima, T., & Ishikawa, K. (2019). Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes? Japanese journal of applied physics, 58(SE), Article SE0803. https://doi.org/10.7567/1347-4065/ab163a

Iwase, T, Kamaji, Y, Kang, SY, Koga, K, Kuboi, N, Nakamura, M, Negishi, N, Nozaki, T, Nunomura, S, Ogawa, D, Omura, M, Shimizu, T, Shinoda, K, Sonoda, Y, Suzuki, H, Takahashi, K, Tsutsumi, T, Yoshikawa, K, Ishijima, T & Ishikawa, K 2019, 'Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?', Japanese journal of applied physics, vol. 58, no. SE, SE0803. https://doi.org/10.7567/1347-4065/ab163a

@article{ce461caeb16e430fbdbe31110a767b46,

title = "Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?",

abstract = "The non-thermal nature of chemical reactions in plasma chemistry is considered to be suitable for next-generation energy production from plasma-material syntheses and renewable sources. As emerging multidisciplinary applications, plasma medicine and plasma agriculture are currently topical applications that make use of atmospheric pressure plasmas. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes with regard to atmospheric pressure plasma technologies as well as material synthesis and thin-film deposition. In this review, selected breakthroughs are reviewed. Finally, near-future major challenges are addressed to encourage new multidisciplinary research across the plasma science and technology community.",

author = "Taku Iwase and Yoshito Kamaji and Kang, {Song Yun} and Kazunori Koga and Nobuyuki Kuboi and Moritaka Nakamura and Nobuyuki Negishi and Tomohiro Nozaki and Shota Nunomura and Daisuke Ogawa and Mitsuhiro Omura and Tetsuji Shimizu and Kazunori Shinoda and Yasushi Sonoda and Haruka Suzuki and Kazuo Takahashi and Takayoshi Tsutsumi and Kenichi Yoshikawa and Tatsuo Ishijima and Kenji Ishikawa",

note = "Publisher Copyright: {\textcopyright} 2019 The Japan Society of Applied Physics.",

year = "2019",

doi = "10.7567/1347-4065/ab163a",

language = "English",

volume = "58",

journal = "Japanese journal of applied physics",

issn = "0021-4922",

publisher = "The Japan Society of Applied Physics",

number = "SE",

}

TY - JOUR

T1 - Progress and perspectives in dry processes for emerging multidisciplinary applications

T2 - How can we improve our use of dry processes?

AU - Iwase, Taku

AU - Kamaji, Yoshito

AU - Kang, Song Yun

AU - Koga, Kazunori

AU - Kuboi, Nobuyuki

AU - Nakamura, Moritaka

AU - Negishi, Nobuyuki

AU - Nozaki, Tomohiro

AU - Nunomura, Shota

AU - Ogawa, Daisuke

AU - Omura, Mitsuhiro

AU - Shimizu, Tetsuji

AU - Shinoda, Kazunori

AU - Sonoda, Yasushi

AU - Suzuki, Haruka

AU - Takahashi, Kazuo

AU - Tsutsumi, Takayoshi

AU - Yoshikawa, Kenichi

AU - Ishijima, Tatsuo

AU - Ishikawa, Kenji

PY - 2019

Y1 - 2019

N2 - The non-thermal nature of chemical reactions in plasma chemistry is considered to be suitable for next-generation energy production from plasma-material syntheses and renewable sources. As emerging multidisciplinary applications, plasma medicine and plasma agriculture are currently topical applications that make use of atmospheric pressure plasmas. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes with regard to atmospheric pressure plasma technologies as well as material synthesis and thin-film deposition. In this review, selected breakthroughs are reviewed. Finally, near-future major challenges are addressed to encourage new multidisciplinary research across the plasma science and technology community.

AB - The non-thermal nature of chemical reactions in plasma chemistry is considered to be suitable for next-generation energy production from plasma-material syntheses and renewable sources. As emerging multidisciplinary applications, plasma medicine and plasma agriculture are currently topical applications that make use of atmospheric pressure plasmas. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes with regard to atmospheric pressure plasma technologies as well as material synthesis and thin-film deposition. In this review, selected breakthroughs are reviewed. Finally, near-future major challenges are addressed to encourage new multidisciplinary research across the plasma science and technology community.

UR - http://www.scopus.com/inward/record.url?scp=85072911116&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85072911116&partnerID=8YFLogxK

U2 - 10.7567/1347-4065/ab163a

DO - 10.7567/1347-4065/ab163a

M3 - Review article

AN - SCOPUS:85072911116

SN - 0021-4922

VL - 58

JO - Japanese journal of applied physics

JF - Japanese journal of applied physics

IS - SE

M1 - SE0803

ER -

Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this