Production Mechanism of a Large-Diameter Uniform Electron Cyclotron Resonance Plasma Generated by a Circular T E 01 Mode Microwave

Nobuyoshi Hirotsu, Toru Yamaguchi, Ryota Hidaka, Masayoshi Tanaka, Yoshinobu Kawai

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

To clarify the production mechanism of a large-diameter uniform electron cyclotron resonance (ECR) plasma generated by a circular TE01 mode microwave experimentally, the wave propagation characteristic in the plasma is measured with an interferometer. It is shown that a microwave introduced into the chamber is transformed mainly into an electron cyclotron wave and then entirely absorbed around the resonance point. Furthermore, it is experimentally proven that the correspondence between the radial distribution of the electric field intensity of injected microwaves and that of waves propagating in plasma may depend on the magnetic field intensity around the injection point. It is also confirmed that it is necessary to optimize the magnetic field configuration to generate a uniform ECR plasma since the absorption region of microwaves is as wide as from ω/ω c e ∼0.65 to adjacent to the resonance point.

Original languageEnglish
Pages (from-to)2712
Number of pages1
JournalJapanese journal of applied physics
Volume33
Issue number5R
DOIs
Publication statusPublished - May 1994
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

Fingerprint

Dive into the research topics of 'Production Mechanism of a Large-Diameter Uniform Electron Cyclotron Resonance Plasma Generated by a Circular T E 01 Mode Microwave'. Together they form a unique fingerprint.

Cite this