Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone

K. Haga, S. Abe, Y. Takizawa, K. Yubuta, T. Shishido

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1 Citation (Scopus)


The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H 7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH 2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 10 4 to 108 Ωcm by the fibrous material with a different preparation condition.

Original languageEnglish
Article number012059
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2013
Externally publishedYes
Event15th International Conference on Thin Films, ICTF 2011 - Kyoto, Japan
Duration: Nov 8 2011Nov 11 2011

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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