Preparation of superconducting multilayer structure for power electronic devices

K. Shingai, Yukihiko Yamagata, T. Ikegami, K. Ebihara

Research output: Contribution to journalArticlepeer-review


Multi-step KrF excimer pulsed laser deposition (MSPLD) technique has been developed to fabricate high-quality micrometer thick superconducting YBa2Cu3O7-x (YBCO) films. As has been shown, a crystallization of YBCO at the initial stage of deposition crucially affects on thick YBCO film performance. Smooth, c-axis oriented 1-μm thick YBCO films with the critical temperature of Tc(zero) = 89.5 K and the overall critical current density of Jc(77 K) = 105 A/cm2 have been prepared on the single crystal MgO substrate in three-step process by monitoring the laser fluence, laser repetition rate and substrate temperature. Micrometer thick YBCO films on the single crystal LaAlO3 substrate show Tc(zero) = 85.7 K and Jc(77 K) = 103 A/cm2, indicating that optimization of MSPLD processing conditions is much more critical for substrates with a small substrate/film lattice mismatch. Furthermore, Pb(Zr,Ti)O3(PZT)/YBa2Cu3O7-x/MgO heterostructures have been prepared by MSPLD technique with the critical temperature of Tc(zero) = 82.0 K in superconducting YBCO layer.

Original languageEnglish
Pages (from-to)247-251
Number of pages5
JournalThin Solid Films
Issue number1-2
Publication statusPublished - Apr 15 1998
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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