Preparation of silicon carbide nano-particles using a pulsed laser deposition method

H. Kawasaki, Y. Suda, T. Ohshima, T. Ueda, S. Nakashima

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We have developed a new pulsed laser deposition technique using two Nd:YAG laser beams for the nucleation of silicon carbide (SiC) crystalline nano-particles and single crystalline SiC thin films. Transmission electron microscopy and atomic force microscopy observation suggest that several nanometer size SiC particles can be prepared by the new pulsed laser deposition (PLD) method using two Nd:YAG laser beams (1064nm and 532nm). X ray photoelectron spectroscopy measurements suggest that the silicon/carbon composition ratio of the prepared SiC thin films can be controlled by laser fluence and wavelength.

Original languageEnglish
Pages (from-to)241-246
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Publication statusPublished - 2004
Externally publishedYes
EventNanoparticles and Nanowire Building Blocks - Synthesis, Processing, Characterization and Theory - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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