Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation

Kenji Ebihara, Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami, Alexander M. Grishin

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

Original languageEnglish
Pages (from-to)193-198
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 13 1998Apr 16 1998

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation'. Together they form a unique fingerprint.

Cite this