Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique

Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami, Kenji Ebihara, Yin Tong Bok

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


A pulsed KrF excimer laser was used to ablate PZT thin films. The composition, crystallization, and ferroelectric properties of the PZT thin films prepared under various conditions were investigated. X ray diffraction (XRD) patterns showed that the PZT thin films prepared on MgO(100) substrates had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provides high quality perovskite films. It was also found that the stoichiometric condition of the deposited films was obtained in ambient oxygen of 100 to approximately 400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were also studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve are discussed.

Original languageEnglish
Pages (from-to)237-242
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 7 1996Apr 12 1996

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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