Preparation of Er2O3 and TiO2 Multilayer Films as Optical Filter Using Magnetron Sputtering Deposition

Hiroharu Kawasaki, Yoshiaki Suda, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


Dispersion relations of refractive indexes and extinction coefficients of constituent materials were obtained by comparing the experimental and simulated transmission spectra of single-layer Er2O3 and TiO2 films. We designed multilayer thin films of [Er2O3/TiO2]6/[Er2 O3]2/[TiO2/Er2O3]6 such that they can act as photonic crystals exhibiting a resonance wavelength of 514 nm. We prepared single-layer TiO2 and Er2O3 thin films on quartz glass substrates by employing a magnetron sputtering deposition method. Uniform films exhibiting very high transmittance values were obtained. Deposition rates of the TiO2 and Er2O3 films were 0.44 and 0.82 nm/s, respectively. [Er2O3/TiO2]6/[Er2 O3]2/[TiO2/Er2O3]6 multilayer films, to be used for optical bandpass filter applications, were also prepared using a multitarget sputtering deposition method. Uniform and transparent films were obtained; however, the wavelength corresponding to the highest transmittance was observed around 490 nm through ultraviolet-visible near-infrared spectroscopic measurements. The shift in the wavelength can be attributed to the low crystallinity and variations in the thicknesses of Er2O3 and TiO2 films.

Original languageEnglish
Article number7490413
Pages (from-to)3066-3070
Number of pages5
JournalIEEE Transactions on Plasma Science
Issue number12
Publication statusPublished - Dec 2016
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics


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