Precise resistivity measurement of submicrometer-sized materials by using tem with microprobes

N. Kawamoto, Y. Murakami, D. Shindo, H. Azehara, H. Tokumoto

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Precise electric resistivity measurements of submicrometer-sized materials have been demonstrated by using the piezodriving mechanics of two microprobes in a transmission electron microscope. By introducing two supplemental copper cables connected to a specimen, an electric circuit similar to that used in the four-terminal method was realized in a specimen holder with two microprobes. By using the proposed method, we determined the resistivity of a needle-shaped Pt-Ir specimen, whose resistance is only of the order of 0.10, with a satisfactory precision of <2 × 10-4 O. This method can be employed in microscopy studies on many submicrometer-sized and/or nanometer-sized materials.

Original languageEnglish
Pages (from-to)1572-1575
Number of pages4
JournalMaterials Transactions
Issue number6
Publication statusPublished - Jun 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Precise resistivity measurement of submicrometer-sized materials by using tem with microprobes'. Together they form a unique fingerprint.

Cite this