Position-controlled growth of SiGe crystal grains on insulator by indentation-induced solid-phase crystallization (Special issue: Active-matrix flatpanel displays and devices: TFT technologies and FPD materials)

Kaoru Toko, Taizoh Sadoh, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)03B007-1〜4
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number3
Publication statusPublished - Mar 2009

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