Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon

Y. Yamagata; A. Sharma; J. Narayan; R. M. Mayo; J. W. Newman; K. Ebihara

Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon

Y. Yamagata, A. Sharma, J. Narayan, R. M. Mayo, J. W. Newman, K. Ebihara

Research output: Contribution to journal › Conference article › peer-review

Abstract

Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (E_L) increase, while the C₂ emission changes drastically with E_L for both ablated plasma plumes. The C₂/C emission intensity ratio for the a-C plume decreases with E_L increase, while the C₂/C ratio for the SCG plume decreases with E_L increase up to 3.0 J/cm², then increases slightly with further E_L increase. Nanohardness of the DLC films decreases with the C₂/C ratio increase. It is suggested that the C₂ molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C₂/C ratio is a good parameter to monitor the PLD process.

Original language	English
Pages (from-to)	255-260
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	593
Publication status	Published - Dec 3 2000
Externally published	Yes
Event	Symposium-Amorphous and Nanoestructured Carbon - Boston, MA, USA Duration: Nov 29 1999 → Dec 2 1999

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@article{5fee5e1afae44182b176f5c01c81ae4d,

title = "Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon",

abstract = "Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase. Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.",

author = "Y. Yamagata and A. Sharma and J. Narayan and Mayo, {R. M.} and Newman, {J. W.} and K. Ebihara",

year = "2000",

month = dec,

day = "3",

language = "English",

volume = "593",

pages = "255--260",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Symposium-Amorphous and Nanoestructured Carbon ; Conference date: 29-11-1999 Through 02-12-1999",

}

TY - JOUR

T1 - Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon

AU - Yamagata, Y.

AU - Sharma, A.

AU - Narayan, J.

AU - Mayo, R. M.

AU - Newman, J. W.

AU - Ebihara, K.

PY - 2000/12/3

Y1 - 2000/12/3

N2 - Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase. Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.

AB - Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase. Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.

UR - http://www.scopus.com/inward/record.url?scp=0033715982&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033715982&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033715982

SN - 0272-9172

VL - 593

SP - 255

EP - 260

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Symposium-Amorphous and Nanoestructured Carbon

Y2 - 29 November 1999 through 2 December 1999

ER -

Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon

Abstract

All Science Journal Classification (ASJC) codes

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