Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis

J. S. Gao; K. Umeda; K. Uchino; H. Nakashima; K. Muraoka

doi:10.1016/S0921-5093(02)00912-7

Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis

J. S. Gao, K. Umeda, K. Uchino, H. Nakashima, K. Muraoka

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

Iron thin films deposited by pulse laser deposition (PLD) were broken into uniform nano-sized catalysts by plasma bombardment for carbon nanotube (CNT) synthesis. Size distributions of broken catalysts were obtained in terms of plasma discharge conditions. Vertically arranged high-density (10¹³ per m²) CNTs were synthesized using microwave plasma chemical vapor deposition (MP-CVD) system and the gas mixture of N₂ and CH₄ on optimally broken catalysts with few carbonaceous particles on a large area Si substrate. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy (RS) were used to evaluate the obtained CNTs.

Original language	English
Pages (from-to)	308-313
Number of pages	6
Journal	Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
Volume	352
Issue number	1-2
DOIs	https://doi.org/10.1016/S0921-5093(02)00912-7
Publication status	Published - Jul 15 2003

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/S0921-5093(02)00912-7

Cite this

@article{0d6957ef94cc4c15ac2e74d0643dd4a0,

title = "Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis",

abstract = "Iron thin films deposited by pulse laser deposition (PLD) were broken into uniform nano-sized catalysts by plasma bombardment for carbon nanotube (CNT) synthesis. Size distributions of broken catalysts were obtained in terms of plasma discharge conditions. Vertically arranged high-density (1013 per m2) CNTs were synthesized using microwave plasma chemical vapor deposition (MP-CVD) system and the gas mixture of N2 and CH4 on optimally broken catalysts with few carbonaceous particles on a large area Si substrate. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy (RS) were used to evaluate the obtained CNTs.",

author = "Gao, {J. S.} and K. Umeda and K. Uchino and H. Nakashima and K. Muraoka",

year = "2003",

month = jul,

day = "15",

doi = "10.1016/S0921-5093(02)00912-7",

language = "English",

volume = "352",

pages = "308--313",

journal = "Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing",

issn = "0921-5093",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis

AU - Gao, J. S.

AU - Umeda, K.

AU - Uchino, K.

AU - Nakashima, H.

AU - Muraoka, K.

PY - 2003/7/15

Y1 - 2003/7/15

N2 - Iron thin films deposited by pulse laser deposition (PLD) were broken into uniform nano-sized catalysts by plasma bombardment for carbon nanotube (CNT) synthesis. Size distributions of broken catalysts were obtained in terms of plasma discharge conditions. Vertically arranged high-density (1013 per m2) CNTs were synthesized using microwave plasma chemical vapor deposition (MP-CVD) system and the gas mixture of N2 and CH4 on optimally broken catalysts with few carbonaceous particles on a large area Si substrate. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy (RS) were used to evaluate the obtained CNTs.

AB - Iron thin films deposited by pulse laser deposition (PLD) were broken into uniform nano-sized catalysts by plasma bombardment for carbon nanotube (CNT) synthesis. Size distributions of broken catalysts were obtained in terms of plasma discharge conditions. Vertically arranged high-density (1013 per m2) CNTs were synthesized using microwave plasma chemical vapor deposition (MP-CVD) system and the gas mixture of N2 and CH4 on optimally broken catalysts with few carbonaceous particles on a large area Si substrate. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy (RS) were used to evaluate the obtained CNTs.

UR - http://www.scopus.com/inward/record.url?scp=0037984774&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037984774&partnerID=8YFLogxK

U2 - 10.1016/S0921-5093(02)00912-7

DO - 10.1016/S0921-5093(02)00912-7

M3 - Article

AN - SCOPUS:0037984774

SN - 0921-5093

VL - 352

SP - 308

EP - 313

JO - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing

JF - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing

IS - 1-2

ER -

Plasma breaking of thin films into nano-sized catalysts for carbon nanotube synthesis

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this