Abstract
Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.
Original language | English |
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Pages (from-to) | S36-S40 |
Journal | Current Applied Physics |
Volume | 11 |
Issue number | 4 SUPPL. |
DOIs | |
Publication status | Published - Jul 2011 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Physics and Astronomy(all)