Optimal ablation of fluorine-doped tin oxide (FTO) thin film layers adopting a simple pulsed Nd:YAG laser with TEM00 mode

Hee Je Kim; Myung Sik Lee; Dong Gil Lee; Min Kyu Son; Kyoung Jun Lee

doi:10.1016/j.optlaseng.2008.10.007

Optimal ablation of fluorine-doped tin oxide (FTO) thin film layers adopting a simple pulsed Nd:YAG laser with TEM₀₀ mode

Hee Je Kim, Myung Sik Lee, Dong Gil Lee, Min Kyu Son, Kyoung Jun Lee

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser ablation technology is thought to be very important for fabricating a dye-sensitized solar cell (DSSC) module with good quality. Moreover, the TEM₀₀ mode laser beam is the most dominant factor to decide the incident photon to current conversion efficiency (IPCE) characteristics. In order to get the TEM₀₀ mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three pin-hole diameters of 1.6, 2.0 and 4.0 mm, respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pulse per second (pps). From those results, it is known that the pin-hole size of 1.6 mm has the perfect TEM₀₀ mode. In addition, at the charging voltage of 1000 V, 10 pps, the feeding speed of 6.08 mm/s and the overlapping rate (OL) of 62%, the scanning electron microscope (SEM) photograph of fluorine-doped tin oxide (FTO) thin film layers shows the best ablation trace. Crown

Original language	English
Pages (from-to)	558-562
Number of pages	5
Journal	Optics and Lasers in Engineering
Volume	47
Issue number	5
DOIs	https://doi.org/10.1016/j.optlaseng.2008.10.007
Publication status	Published - May 2009

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1016/j.optlaseng.2008.10.007

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@article{2540b8cd4e9640698205d42edbf2747a,

title = "Optimal ablation of fluorine-doped tin oxide (FTO) thin film layers adopting a simple pulsed Nd:YAG laser with TEM00 mode",

abstract = "In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser ablation technology is thought to be very important for fabricating a dye-sensitized solar cell (DSSC) module with good quality. Moreover, the TEM00 mode laser beam is the most dominant factor to decide the incident photon to current conversion efficiency (IPCE) characteristics. In order to get the TEM00 mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three pin-hole diameters of 1.6, 2.0 and 4.0 mm, respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pulse per second (pps). From those results, it is known that the pin-hole size of 1.6 mm has the perfect TEM00 mode. In addition, at the charging voltage of 1000 V, 10 pps, the feeding speed of 6.08 mm/s and the overlapping rate (OL) of 62%, the scanning electron microscope (SEM) photograph of fluorine-doped tin oxide (FTO) thin film layers shows the best ablation trace. Crown",

author = "Kim, {Hee Je} and Lee, {Myung Sik} and Lee, {Dong Gil} and Son, {Min Kyu} and Lee, {Kyoung Jun}",

year = "2009",

month = may,

doi = "10.1016/j.optlaseng.2008.10.007",

language = "English",

volume = "47",

pages = "558--562",

journal = "Optics and Lasers in Engineering",

issn = "0143-8166",

publisher = "Elsevier Limited",

number = "5",

}

TY - JOUR

T1 - Optimal ablation of fluorine-doped tin oxide (FTO) thin film layers adopting a simple pulsed Nd:YAG laser with TEM00 mode

AU - Kim, Hee Je

AU - Lee, Myung Sik

AU - Lee, Dong Gil

AU - Son, Min Kyu

AU - Lee, Kyoung Jun

PY - 2009/5

Y1 - 2009/5

N2 - In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser ablation technology is thought to be very important for fabricating a dye-sensitized solar cell (DSSC) module with good quality. Moreover, the TEM00 mode laser beam is the most dominant factor to decide the incident photon to current conversion efficiency (IPCE) characteristics. In order to get the TEM00 mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three pin-hole diameters of 1.6, 2.0 and 4.0 mm, respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pulse per second (pps). From those results, it is known that the pin-hole size of 1.6 mm has the perfect TEM00 mode. In addition, at the charging voltage of 1000 V, 10 pps, the feeding speed of 6.08 mm/s and the overlapping rate (OL) of 62%, the scanning electron microscope (SEM) photograph of fluorine-doped tin oxide (FTO) thin film layers shows the best ablation trace. Crown

AB - In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser ablation technology is thought to be very important for fabricating a dye-sensitized solar cell (DSSC) module with good quality. Moreover, the TEM00 mode laser beam is the most dominant factor to decide the incident photon to current conversion efficiency (IPCE) characteristics. In order to get the TEM00 mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three pin-hole diameters of 1.6, 2.0 and 4.0 mm, respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pulse per second (pps). From those results, it is known that the pin-hole size of 1.6 mm has the perfect TEM00 mode. In addition, at the charging voltage of 1000 V, 10 pps, the feeding speed of 6.08 mm/s and the overlapping rate (OL) of 62%, the scanning electron microscope (SEM) photograph of fluorine-doped tin oxide (FTO) thin film layers shows the best ablation trace. Crown

UR - http://www.scopus.com/inward/record.url?scp=61349137561&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=61349137561&partnerID=8YFLogxK

U2 - 10.1016/j.optlaseng.2008.10.007

DO - 10.1016/j.optlaseng.2008.10.007

M3 - Article

AN - SCOPUS:61349137561

SN - 0143-8166

VL - 47

SP - 558

EP - 562

JO - Optics and Lasers in Engineering

JF - Optics and Lasers in Engineering

IS - 5

ER -

Optimal ablation of fluorine-doped tin oxide (FTO) thin film layers adopting a simple pulsed Nd:YAG laser with TEM₀₀ mode

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