Optical thin films grown by surface chemical reaction for high-power lasers

Zaitsu Shin-Ichi, S. Motokoshi, T. Jitsuno, M. Nakatsuka, T. Yamanaka

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.

Original languageEnglish
Pages (from-to)140-145
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Jan 1 2001
Externally publishedYes
Event32nd Annual Boulder Damage Symposium - Laser-Induced Damaged in Optical Materials: 2000 - Boulder, CO, United States
Duration: Oct 16 2000Oct 18 2000

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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