Optical thin films grown by surface chemical reaction for high-power lasers

Zaitsu Shin-Ichi; S. Motokoshi; T. Jitsuno; M. Nakatsuka; T. Yamanaka

doi:10.1117/12.425045

Optical thin films grown by surface chemical reaction for high-power lasers

Zaitsu Shin-Ichi, S. Motokoshi, T. Jitsuno, M. Nakatsuka, T. Yamanaka

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO₂ films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm² for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO₂ films decreased at higher growth temperature. TiO₂ films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.

Original language	English
Pages (from-to)	140-145
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4347
DOIs	https://doi.org/10.1117/12.425045
Publication status	Published - Jan 1 2001
Externally published	Yes
Event	32nd Annual Boulder Damage Symposium - Laser-Induced Damaged in Optical Materials: 2000 - Boulder, CO, United States Duration: Oct 16 2000 → Oct 18 2000

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.425045

Cite this

@article{6ea2a8b5724a4905909576292725bfd2,

title = "Optical thin films grown by surface chemical reaction for high-power lasers",

abstract = "We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.",

author = "Zaitsu Shin-Ichi and S. Motokoshi and T. Jitsuno and M. Nakatsuka and T. Yamanaka",

year = "2001",

month = jan,

day = "1",

doi = "10.1117/12.425045",

language = "English",

volume = "4347",

pages = "140--145",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "32nd Annual Boulder Damage Symposium - Laser-Induced Damaged in Optical Materials: 2000 ; Conference date: 16-10-2000 Through 18-10-2000",

}

TY - JOUR

T1 - Optical thin films grown by surface chemical reaction for high-power lasers

AU - Shin-Ichi, Zaitsu

AU - Motokoshi, S.

AU - Jitsuno, T.

AU - Nakatsuka, M.

AU - Yamanaka, T.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.

AB - We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.

UR - http://www.scopus.com/inward/record.url?scp=0034841590&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034841590&partnerID=8YFLogxK

U2 - 10.1117/12.425045

DO - 10.1117/12.425045

M3 - Conference article

AN - SCOPUS:0034841590

SN - 0277-786X

VL - 4347

SP - 140

EP - 145

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - 32nd Annual Boulder Damage Symposium - Laser-Induced Damaged in Optical Materials: 2000

Y2 - 16 October 2000 through 18 October 2000

ER -

Optical thin films grown by surface chemical reaction for high-power lasers

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this