Optical microsensors integration technologies for biomedical applications

Eiji Higurashi; Renshi Sawada; Tadatomo Suga

doi:10.1587/transele.E92.C.231

Optical microsensors integration technologies for biomedical applications

Eiji Higurashi, Renshi Sawada, Tadatomo Suga

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.

Original language	English
Pages (from-to)	231-238
Number of pages	8
Journal	IEICE Transactions on Electronics
Volume	E92-C
Issue number	2
DOIs	https://doi.org/10.1587/transele.E92.C.231
Publication status	Published - 2009

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1587/transele.E92.C.231

Cite this

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Optical microsensors integration technologies for biomedical applications

Abstract

All Science Journal Classification (ASJC) codes

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