Optical and structural properties of zinc-oxide thin film deposited by pulsed laser deposition

Tamiko Ohshima, Raj K. Thareja, Yukihiko Yamagata, Tomoaki Ikegami, Kenji Ebihara

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


We report optical and structural properties of ZnO films deposited by pulsed laser deposition technique on silicon (100) n-type, quartz, sapphire, and coming glass substrates. We have studied the influence of the deposition parameters, such as substrate temperature, oxygen pressure, and laser fluence on the properties of the grown films. Dependence of nanocrystallites on temperature of substrate and ambient gas pressure is investigated. ZnO plasma created at varying fluence of KrF laser (248 nm) on the target was investigated using optical emission spectroscopy and 2-d images of the expanding plumes at various pressures of the ambient gas. X-ray diffraction, atomic force microscopy, electron probe micro-analyzer, and spectro-photometry were used to characterize as grown films.

Original languageEnglish
Pages (from-to)F3201-F3206
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2001
Externally publishedYes
EventTransport and Microstructural Phenomena in Oxide Electronics - San Francisco, CA, United States
Duration: Apr 16 2001Apr 20 2001

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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