TY - JOUR
T1 - One-trillionth level toluene detection using a dual-designed semiconductor gas sensor
T2 - Material and sensor-driven designs
AU - Suematsu, Koichi
AU - Harano, Wataru
AU - Yamasaki, Shigeto
AU - Watanabe, Ken
AU - Shimanoe, Kengo
N1 - Funding Information:
We thank Figaro Engineering Inc. for providing the microsensor device. This work was partially supported by JSPS KAKENHI grant Number JP19K15659 and JP19H02437. This work was partially supported by Yoshida Foundation for the Promotion of Learning and Education. We would like to thank Editage (www.editage.com) for English language editing.
Funding Information:
We thank Figaro Engineering Inc. for providing the microsensor device. This work was partially supported by JSPS KAKENHI grant Number JP19K15659 and JP19H02437. This work was partially supported by Yoshida Foundation for the Promotion of Learning and Education. We would like to thank Editage ( www.editage.com ) for English language editing.
Publisher Copyright:
© 2020 American Chemical Society
PY - 2020/12/22
Y1 - 2020/12/22
N2 - Lowering the volatile organic compound (VOC) gas detection limit toward the ppt level on a resistive-type semiconductor gas sensor was achieved by combining the material and sensor-driven designs. We fabricated Pd-SnO2 clustered nanoparticles, a material that is highly sensitive to VOC gas, on a microsensor device with a double-pulse-driven mode. This mode was involved in switching the heater-on periods at high-temperature preheating and measurement phases and the rest phase during a heater-off period between preheating and measurement phases. The electrical resistance in synthetic air and the sensor response to toluene increased as preheating temperatures increased because of an increase in the amount of O2− adsorbed on the particle surface. In addition, extending the rest time between the preheating and measurement phases significantly improved the sensor response to toluene. According to the relationship between the sensor response and toluene concentration, we improved the lower detection limit for toluene gas to below 10 ppt, with preheating and measurement temperatures at 400 and 250 °C, respectively, and rest time at 100 s. Therefore, the combination of the material and sensor-driven designs may play a key role in improving the sensor performance.
AB - Lowering the volatile organic compound (VOC) gas detection limit toward the ppt level on a resistive-type semiconductor gas sensor was achieved by combining the material and sensor-driven designs. We fabricated Pd-SnO2 clustered nanoparticles, a material that is highly sensitive to VOC gas, on a microsensor device with a double-pulse-driven mode. This mode was involved in switching the heater-on periods at high-temperature preheating and measurement phases and the rest phase during a heater-off period between preheating and measurement phases. The electrical resistance in synthetic air and the sensor response to toluene increased as preheating temperatures increased because of an increase in the amount of O2− adsorbed on the particle surface. In addition, extending the rest time between the preheating and measurement phases significantly improved the sensor response to toluene. According to the relationship between the sensor response and toluene concentration, we improved the lower detection limit for toluene gas to below 10 ppt, with preheating and measurement temperatures at 400 and 250 °C, respectively, and rest time at 100 s. Therefore, the combination of the material and sensor-driven designs may play a key role in improving the sensor performance.
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U2 - 10.1021/acsaelm.0c00902
DO - 10.1021/acsaelm.0c00902
M3 - Article
AN - SCOPUS:85097955633
SN - 2637-6113
VL - 2
SP - 4122
EP - 4126
JO - ACS Applied Electronic Materials
JF - ACS Applied Electronic Materials
IS - 12
ER -