On-demand inkjet-printed microdisk laser with air cladding by liquid flow microetching

Taku Takagishi, Hiroaki Yoshioka, Yuya Mikami, Yuji Oki

Research output: Contribution to journalArticlepeer-review


We have novelly, to the best of our knowledge, developed the liquid flow microetching method that can treat a single microdisk in a microregion with precise position control for inkjet-printed microdisk lasers. The injection-drain wet etching setup consisted of two microneedles that successfully performed a formation of a fine undercut structure of an inkjet-printed microdisk on a pre-pedestal layer through the individual wet etching process. Then measurement of the undercut structure using scanning electron microscopy and lasing characteristics with whispering gallery modes were carried out to demonstrate performance of the etched microdisks. The measured lasing threshold decreased by half compared with that of the unetched microdisk directly printed on a fluorine-type film. A point to note is that this etching method exhibits an excellent undercut and lasing characteristics even when using a clad pre-pedestal layer having a refractive index higher than that of core microdisks. This technique, combined with inkjet printing, offers a powerful tool for individually designing a microdisk and can help develop novel devices that comprise several inkjet-printed microdisks being evanescently coupled.

Original languageEnglish
Pages (from-to)6340-6346
Number of pages7
JournalApplied Optics
Issue number21
Publication statusPublished - Jul 20 2020


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