On-chip, high-sensitivity temperature sensors based on dye-doped solid-state polymer microring lasers

Lei Wan, Hengky Chandrahalim, Cong Chen, Qiushu Chen, Ting Mei, Yuji Oki, Naoya Nishimura, L. Jay Guo, Xudong Fan

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


We developed a chip-scale temperature sensor with a high sensitivity of 228.6 pm/°C based on a rhodamine 6G (R6G)-doped SU-8 whispering gallery mode microring laser. The optical mode was largely distributed in a polymer core layer with a 30 μm height that provided detection sensitivity, and the chemically robust fused-silica microring resonator host platform guaranteed its versatility for investigating different functional polymer materials with different refractive indices. As a proof of concept, a dye-doped hyperbranched polymer (TZ-001) microring laser-based temperature sensor was simultaneously developed on the same host wafer and characterized using a free-space optics measurement setup. Compared to TZ-001, the SU-8 polymer microring laser had a lower lasing threshold and a better photostability. The R6G-doped SU-8 polymer microring laser demonstrated greater adaptability as a high-performance temperature-sensing element. In addition to the sensitivity, the temperature resolutions for the laser-based sensors were also estimated to be 0.13 °C and 0.35 °C, respectively. The rapid and simple implementation of micrometer-sized temperature sensors that operate in the range of 31 - 43 °C enables their potential application in thermometry.

Original languageEnglish
Article number061109
JournalApplied Physics Letters
Issue number6
Publication statusPublished - Aug 7 2017

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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