Abstract
A new micromirror fabrication technique for application to silica based programmable logic controllers, which uses the surface tension of resin, is reported. A new wettability control technique is developed that improves the mirror angle controllability. The photoreceiver has a sufficiently wide bandwidth to operate at 2.5 Gb/s and 5 Gb/s.
| Original language | English |
|---|---|
| Pages (from-to) | 311-312 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 1 |
| Publication status | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 11th Annual Meeting IEEE Lasers and Electro-Optics Society, LEOS. Part 2 (of 2) - Orlando, FL, USA Duration: Dec 1 1998 → Dec 4 1998 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering