Abstract
Novel applications of microbubble migration controlled by microheaters are proposed and demonstrated. One is a liquid-film-type motor/conveyer. Vapor or gas bubbles in the cavities on rotor are driven based on Marangoni effect caused by the microheaters on stator. The other is a "valve-less" valve, which is made of in-line microheaters at an intersection of microchannels, where a microbubble moves according to the thermocapillary force and shuts-off liquid flow due to its surface hardness with no mechanical part. With the developments of these new devices, the mechanisms of heat transfer and fluid motion around the microbubble are discussed.
Original language | English |
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Pages | 286-289 |
Number of pages | 4 |
Publication status | Published - Jan 1 2001 |
Event | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: Jan 21 2001 → Jan 25 2001 |
Other
Other | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) |
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Country/Territory | Switzerland |
City | Interlaken |
Period | 1/21/01 → 1/25/01 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering