Nanoscale topography measurements with a metal nanowire AFM tip

M. Motoyama, F. B. Prinz

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper describes comparison between atomic force microscope (AFM) measurements with a Si tip and a 200-nm-diameter Ni nanowire tip. A produced nanowire AFM probe successfully produced topographic images showing profiles convoluted with a tip radius of 100-200 nm. Bending stiffness of metal nanowires realizes a smaller lateral spring constant than Si and Si3N 4 tips. Inelastic deformations of nanowires occurred under excessive loads. The maximum end deflections for nanowires to break the elasticity, which beam mechanics indicates, were applicable to our observed results.

Original languageEnglish
Title of host publicationElectrochemical Processing in ULSI and MEMS 4
PublisherElectrochemical Society Inc.
Number of pages12
ISBN (Electronic)9781566777667
ISBN (Print)9781607681168
Publication statusPublished - 2009
Externally publishedYes

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

All Science Journal Classification (ASJC) codes

  • Engineering(all)


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