@inproceedings{08a8b06feb744443b58d9166341db965,
title = "Nanoscale topography measurements with a metal nanowire AFM tip",
abstract = "This paper describes comparison between atomic force microscope (AFM) measurements with a Si tip and a 200-nm-diameter Ni nanowire tip. A produced nanowire AFM probe successfully produced topographic images showing profiles convoluted with a tip radius of 100-200 nm. Bending stiffness of metal nanowires realizes a smaller lateral spring constant than Si and Si3N 4 tips. Inelastic deformations of nanowires occurred under excessive loads. The maximum end deflections for nanowires to break the elasticity, which beam mechanics indicates, were applicable to our observed results.",
author = "M. Motoyama and Prinz, {F. B.}",
year = "2009",
doi = "10.1149/1.3246601",
language = "English",
isbn = "9781607681168",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "24",
pages = "85--96",
booktitle = "Electrochemical Processing in ULSI and MEMS 4",
edition = "24",
}