Abstract
Using the ultraviolet laser ablation, a very thin layer removal of a polymer and a glass was possible by single laser shot. Element analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate sample in combination with the laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.
| Original language | English |
|---|---|
| Pages | I34-I35 |
| Publication status | Published - 2001 |
| Event | 4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan Duration: Jul 15 2001 → Jul 19 2001 |
Other
| Other | 4th Pacific Rim Conference on Lasers and Electro-Optics |
|---|---|
| Country/Territory | Japan |
| City | Chiba |
| Period | 7/15/01 → 7/19/01 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering