Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

Yuji Oki, Mitsuo Maeda, Akira Hirano

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

Original languageEnglish
Pages (from-to)330
Number of pages1
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Publication statusPublished - 1996
EventProceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA
Duration: Jun 2 1996Jun 7 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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