Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas

Masayoshi Tanaka, Keisuke Nagao, Hiroaki Shoyama, Masaya Sugimoto, Yoshinobu Kawai

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.

Original languageEnglish
Pages (from-to)5028-5031
Number of pages4
JournalJapanese journal of applied physics
Volume33
Issue number9 R
DOIs
Publication statusPublished - Sept 1994
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

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