TY - JOUR
T1 - Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port
AU - Shindo, Daisuke
AU - Suzuki, Satoshi
AU - Sato, Kuniaki
AU - Akase, Zentaro
AU - Murakami, Yasukazu
AU - Yamazaki, Kazuya
AU - Ikeda, Yuuta
AU - Fukuda, Tomohisa
N1 - Funding Information:
This work was partly supported by Post-Silicon Materials and Devices Research Alliance for Special Education and Research Expenses and by Grants-in-Aid for Scientific Research (S) (19106002) from JSPS.
PY - 2013/8
Y1 - 2013/8
N2 - The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography.
AB - The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography.
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U2 - 10.1093/jmicro/dft021
DO - 10.1093/jmicro/dft021
M3 - Article
C2 - 23568257
AN - SCOPUS:84883274269
SN - 0022-0744
VL - 62
SP - 487
EP - 490
JO - Journal of Electron Microscopy
JF - Journal of Electron Microscopy
IS - 4
ER -