Multi-chip hybrid integration on PLC platform using passive alignment technique

Y. Nakasuga, T. Hashimoto, Y. Yamada, H. Terui, M. Yanagisawa, K. Moriwaki, Y. Akahori, Y. Tohmori, K. Kato, S. Sekine, M. Horiguchi

Research output: Contribution to journalConference articlepeer-review

21 Citations (Scopus)


A multi-chip hybrid integration technique on a planar lightwave circuit (PLC) platform achieves bonding accuracy of better than 1.0 μm and adequate bonding strength. This procedure consists of a chip-by-chip alignment step and a simultaneous solder reflowing step. In the chip-by-chip assembly step, opto-electronic chips were successively placed at their optimum positions by passive alignment while keeping the platform temperature below the solder melting point. In the solder reflowing step, all chips were bonded simultaneously by reflowing the solder. This procedure was used to fabricate a transceiver module consisting of a Y-branch PLC and three optical devices: a spot-size converted laser diode as a transmitter, a monitor photodetector, and a waveguide photodetector as a receiver. These chips were integrated in a small area of only 1.3 mm x 2.0 mm with an accuracy of 1.0 μm. This demonstrates the potential of this procedure for fabricating highly functional and low-cost optical modules.

Original languageEnglish
Pages (from-to)20-25
Number of pages6
JournalProceedings - Electronic Components and Technology Conference
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 IEEE 46th Electronic Components & Technology Conference, ECTC - Orlando, FL, USA
Duration: May 28 1996May 31 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


Dive into the research topics of 'Multi-chip hybrid integration on PLC platform using passive alignment technique'. Together they form a unique fingerprint.

Cite this