Abstract
A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 μm × 800 μm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 mm) as a movable external object.
| Original language | English |
|---|---|
| Pages (from-to) | 1746-1751 |
| Number of pages | 6 |
| Journal | Applied Optics |
| Volume | 38 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - Mar 20 1999 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering