Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver

Y. Akahori; Y. Muramoto; K. Kato; M. Ikeda; A. Kozen; Y. Itaya

Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver

Y. Akahori, Y. Muramoto, K. Kato, M. Ikeda, A. Kozen, Y. Itaya

Research output: Contribution to journal › Conference article › peer-review

Abstract

The paper presents an evaluation of a high speed side-illuminated receiver OEIC. This receiver consists of a waveguide p-i-n photodiode (WGPD) and an In AlAs/InGaAs HEMT transimpedance amplifier. The monolithic integration was accomplished by C₂H₆/O₂ RIE, together with passivation on the HEMT structure. The photoreceiver had a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 Ω. This technology will lead to a high performance photonic circuits integrated with high-speed electronic circuits to control and process light signals.

Original language	English
Pages (from-to)	49-50
Number of pages	2
Journal	LEOS Summer Topical Meeting
Publication status	Published - 1994
Externally published	Yes
Event	Proceedings of the LEOS 1994 Summer Topical Meeting - Lake Tahoe, NV, USA Duration: Jul 6 1994 → Jul 8 1994

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Cite this

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title = "Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver",

abstract = "The paper presents an evaluation of a high speed side-illuminated receiver OEIC. This receiver consists of a waveguide p-i-n photodiode (WGPD) and an In AlAs/InGaAs HEMT transimpedance amplifier. The monolithic integration was accomplished by C2H6/O2 RIE, together with passivation on the HEMT structure. The photoreceiver had a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 Ω. This technology will lead to a high performance photonic circuits integrated with high-speed electronic circuits to control and process light signals.",

author = "Y. Akahori and Y. Muramoto and K. Kato and M. Ikeda and A. Kozen and Y. Itaya",

year = "1994",

language = "English",

pages = "49--50",

journal = "LEOS Summer Topical Meeting",

issn = "1099-4742",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the LEOS 1994 Summer Topical Meeting ; Conference date: 06-07-1994 Through 08-07-1994",

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TY - JOUR

T1 - Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver

AU - Akahori, Y.

AU - Muramoto, Y.

AU - Kato, K.

AU - Ikeda, M.

AU - Kozen, A.

AU - Itaya, Y.

PY - 1994

Y1 - 1994

N2 - The paper presents an evaluation of a high speed side-illuminated receiver OEIC. This receiver consists of a waveguide p-i-n photodiode (WGPD) and an In AlAs/InGaAs HEMT transimpedance amplifier. The monolithic integration was accomplished by C2H6/O2 RIE, together with passivation on the HEMT structure. The photoreceiver had a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 Ω. This technology will lead to a high performance photonic circuits integrated with high-speed electronic circuits to control and process light signals.

AB - The paper presents an evaluation of a high speed side-illuminated receiver OEIC. This receiver consists of a waveguide p-i-n photodiode (WGPD) and an In AlAs/InGaAs HEMT transimpedance amplifier. The monolithic integration was accomplished by C2H6/O2 RIE, together with passivation on the HEMT structure. The photoreceiver had a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 Ω. This technology will lead to a high performance photonic circuits integrated with high-speed electronic circuits to control and process light signals.

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UR - http://www.scopus.com/inward/citedby.url?scp=0028557717&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0028557717

SN - 1099-4742

SP - 49

EP - 50

JO - LEOS Summer Topical Meeting

JF - LEOS Summer Topical Meeting

T2 - Proceedings of the LEOS 1994 Summer Topical Meeting

Y2 - 6 July 1994 through 8 July 1994

ER -

Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver

Abstract

All Science Journal Classification (ASJC) codes

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