Modified metal-induced lateral crystallization using amorphous Ge/Si layered structure

Hiroshi Kanno, Atsushi Kenjo, Taizoh Sadoh, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


Amorphous layered structures of Ge/Si were used for investigating metal-induced lateral crystallization (MILC). Secondary-ion mass spectroscopy (SIMS) assisted in the evaluation of the concentration profiles of Si, Ge, and Ni atoms at room temperature. As compared with the conventional MILC using a-Si single layers, modified MILC velocity increased by three times. In a short time annealing, poly-Si films with large areas were obtained. The bond rearrangement in the a-Si layers that was induced by crystal nucleation in a-Ge layers was responsible for the enhancement obtained for the layered structures.

Original languageEnglish
Pages (from-to)899-901
Number of pages3
JournalApplied Physics Letters
Issue number6
Publication statusPublished - Aug 9 2004

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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