Mode selective probing method of micro trench structure using optically trapped probe

Yasuhiro Takaya; Masaki Michihata; Terutake Hayashi; Taisuke Washitani

doi:10.1109/ISOT.2012.6403241

Mode selective probing method of micro trench structure using optically trapped probe

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.

Original language	English
Title of host publication	2012 International Symposium on Optomechatronic Technologies, ISOT 2012
DOIs	https://doi.org/10.1109/ISOT.2012.6403241
Publication status	Published - Dec 1 2012
Externally published	Yes
Event	2012 International Symposium on Optomechatronic Technologies, ISOT 2012 - Paris, France Duration: Oct 29 2012 → Oct 31 2012

Publication series

Name	2012 International Symposium on Optomechatronic Technologies, ISOT 2012

Other

Other	2012 International Symposium on Optomechatronic Technologies, ISOT 2012
Country/Territory	France
City	Paris
Period	10/29/12 → 10/31/12

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Mechanical Engineering

Access to Document

10.1109/ISOT.2012.6403241

Cite this

Mode selective probing method of micro trench structure using optically trapped probe. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake et al.
2012 International Symposium on Optomechatronic Technologies, ISOT 2012. 2012. 6403241 (2012 International Symposium on Optomechatronic Technologies, ISOT 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takaya, Y, Michihata, M, Hayashi, T & Washitani, T 2012, Mode selective probing method of micro trench structure using optically trapped probe. in 2012 International Symposium on Optomechatronic Technologies, ISOT 2012., 6403241, 2012 International Symposium on Optomechatronic Technologies, ISOT 2012, 2012 International Symposium on Optomechatronic Technologies, ISOT 2012, Paris, France, 10/29/12. https://doi.org/10.1109/ISOT.2012.6403241

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title = "Mode selective probing method of micro trench structure using optically trapped probe",

abstract = "Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.",

author = "Yasuhiro Takaya and Masaki Michihata and Terutake Hayashi and Taisuke Washitani",

year = "2012",

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doi = "10.1109/ISOT.2012.6403241",

language = "English",

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series = "2012 International Symposium on Optomechatronic Technologies, ISOT 2012",

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AU - Takaya, Yasuhiro

AU - Michihata, Masaki

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AU - Washitani, Taisuke

PY - 2012/12/1

Y1 - 2012/12/1

N2 - Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.

AB - Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.

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M3 - Conference contribution

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SN - 9781467328777

T3 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012

BT - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012

T2 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012

Y2 - 29 October 2012 through 31 October 2012

ER -

Mode selective probing method of micro trench structure using optically trapped probe

Abstract

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Other

All Science Journal Classification (ASJC) codes

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