Microstructure of Ge:Ta2O5 granular thin films: An application of TEM-tomography

Hongye Gao, Shoichi Toh, Syo Matsumura, Seishi Abe, Shigehiro Ohnuma

Research output: Contribution to journalArticlepeer-review


Microstructure of Ge: Ta2O5 granular thin films were observed by Transmission Electron Microscopy (TEM), Scanning Transmission Electron Microscopy with Energy Dispersive Spectrometer (STEM-EDS), and TEM with electron tomography. Three dimensional images Ge: Ta2O5 granular thin films were obtained from a tilt series of images, which were taken at regular tilt intervals. Some convex parts of irregular Ge granules, which overlapped by themselves or Ta2O5 in this thin film, have been well characterized to explain why there are many Moiré patterns in this Ge: Ta2O5 granular thin films. The result acquired by TEM with electron tomography shows Ge crystals have been grown up in a preferred orientation due to the confinement from the surrounding matrix. TEM with electron tomography can be used successfully to show the shapes of Ge particles distributed in the Ta2O5 network of this thin film, also the more detailed aspects of grown direction of this granular thin film.

Original languageEnglish
Pages (from-to)2567-2571
Number of pages5
JournalMaterials Transactions
Issue number10
Publication statusPublished - Oct 2007

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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