Micromaterials: III: Microelemtent Fabrication Technology

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	208-214
Number of pages	7
Journal	Zairyo/Journal of the Society of Materials Science, Japan
Volume	47
Issue number	2
DOIs	https://doi.org/10.2472/jsms.47.208
Publication status	Published - 1998

All Science Journal Classification (ASJC) codes

@article{cd0b61bfffec4975ba2cca56ea785c46,

title = "Micromaterials: III: Microelemtent Fabrication Technology",

author = "Tanemasa Asano",

year = "1998",

doi = "10.2472/jsms.47.208",

language = "English",

volume = "47",

pages = "208--214",

journal = "Zairyo/Journal of the Society of Materials Science, Japan",

issn = "0514-5163",

publisher = "公益社団法人日本材料学会",

number = "2",

}

TY - JOUR

T1 - Micromaterials

T2 - III: Microelemtent Fabrication Technology

AU - Asano, Tanemasa

PY - 1998

Y1 - 1998

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U2 - 10.2472/jsms.47.208

DO - 10.2472/jsms.47.208

M3 - Article

AN - SCOPUS:85024719350

SN - 0514-5163

VL - 47

SP - 208

EP - 214

JO - Zairyo/Journal of the Society of Materials Science, Japan

JF - Zairyo/Journal of the Society of Materials Science, Japan

IS - 2

ER -