Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami; Shuichi Torii; Tetsuya Makimura; Kota Okazaki; Daisuke Nakamura; Akihiko Takahashi; Tatsuo Okada; Hiroyuki Niino; Koichi Murakami

doi:10.1109/CLEOPR.2013.6600551

Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

Original language	English
Title of host publication	2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs	https://doi.org/10.1109/CLEOPR.2013.6600551
Publication status	Published - 2013
Event	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan Duration: Jun 30 2013 → Jul 4 2013

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Country/Territory	Japan
City	Kyoto
Period	6/30/13 → 7/4/13

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2013.6600551

Cite this

Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H., & Murakami, K. (2013). Micromachining of polydimethylsiloxane using EUV light. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 Article 6600551 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551

Micromachining of polydimethylsiloxane using EUV light. / Fukami, Shintaron; Torii, Shuichi; Makimura, Tetsuya et al.
2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600551 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fukami, S, Torii, S, Makimura, T, Okazaki, K, Nakamura, D , Takahashi, A, Okada, T, Niino, H & Murakami, K 2013, Micromachining of polydimethylsiloxane using EUV light. in 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600551, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600551

@inproceedings{c7594f94c016438b922bfda6a21ade88,

title = "Micromachining of polydimethylsiloxane using EUV light",

abstract = "We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.",

author = "Shintaron Fukami and Shuichi Torii and Tetsuya Makimura and Kota Okazaki and Daisuke Nakamura and Akihiko Takahashi and Tatsuo Okada and Hiroyuki Niino and Koichi Murakami",

year = "2013",

doi = "10.1109/CLEOPR.2013.6600551",

language = "English",

isbn = "9781467364751",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

booktitle = "2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013",

note = "10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 ; Conference date: 30-06-2013 Through 04-07-2013",

}

TY - GEN

T1 - Micromachining of polydimethylsiloxane using EUV light

AU - Fukami, Shintaron

AU - Torii, Shuichi

AU - Makimura, Tetsuya

AU - Okazaki, Kota

AU - Nakamura, Daisuke

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

AU - Niino, Hiroyuki

AU - Murakami, Koichi

PY - 2013

Y1 - 2013

N2 - We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

AB - We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

UR - http://www.scopus.com/inward/record.url?scp=84885454060&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885454060&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2013.6600551

DO - 10.1109/CLEOPR.2013.6600551

M3 - Conference contribution

AN - SCOPUS:84885454060

SN - 9781467364751

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013

T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013

Y2 - 30 June 2013 through 4 July 2013

ER -

Micromachining of polydimethylsiloxane using EUV light

Abstract

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Other

All Science Journal Classification (ASJC) codes

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