Microlens Fabricated by the Planar Process

Jun Ichi Shimada; Osamu Ohguchi; Renshi Sawada

doi:10.1109/50.79532

Microlens Fabricated by the Planar Process

Jun Ichi Shimada, Osamu Ohguchi, Renshi Sawada

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

Original language	English
Pages (from-to)	571-576
Number of pages	6
Journal	Journal of Lightwave Technology
Volume	9
Issue number	5
DOIs	https://doi.org/10.1109/50.79532
Publication status	Published - May 1991
Externally published	Yes

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1109/50.79532

Cite this

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title = "Microlens Fabricated by the Planar Process",

abstract = "A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.",

author = "Shimada, {Jun Ichi} and Osamu Ohguchi and Renshi Sawada",

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N2 - A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

AB - A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

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Microlens Fabricated by the Planar Process

Abstract

All Science Journal Classification (ASJC) codes

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