Microlens Fabricated by the Planar Process

Jun Ichi Shimada, Osamu Ohguchi, Renshi Sawada

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

Original languageEnglish
Pages (from-to)571-576
Number of pages6
JournalJournal of Lightwave Technology
Issue number5
Publication statusPublished - May 1991
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


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