The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi 0.3Sb 1.7Te 3 (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si 3N 4/SiO 2 multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 -3 W/mK 2 and 0.22 × 10 -3 W/mK 2, respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry