Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor

W. Shin; T. Nakashima; M. Nishibori; T. Itoh; N. Izu; I. Matsubara; Y. Nakagawa; A. Yamamoto; H. Obara

doi:10.1007/s11664-011-1581-5

Microgenerator using BiSbTe-Pt thermopile and Pt-Al ₂O ₃ ceramic combustor

W. Shin, T. Nakashima, M. Nishibori, T. Itoh, N. Izu, I. Matsubara, Y. Nakagawa, A. Yamamoto, H. Obara

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi _0.3Sb _1.7Te ₃ (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si ₃N ₄/SiO ₂ multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 ^-3 W/mK ² and 0.22 × 10 ^-3 W/mK ², respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.

Original language	English
Pages (from-to)	817-822
Number of pages	6
Journal	Journal of Electronic Materials
Volume	40
Issue number	5
DOIs	https://doi.org/10.1007/s11664-011-1581-5
Publication status	Published - May 2011
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1007/s11664-011-1581-5

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title = "Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor",

abstract = "The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi 0.3Sb 1.7Te 3 (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si 3N 4/SiO 2 multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 -3 W/mK 2 and 0.22 × 10 -3 W/mK 2, respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.",

author = "W. Shin and T. Nakashima and M. Nishibori and T. Itoh and N. Izu and I. Matsubara and Y. Nakagawa and A. Yamamoto and H. Obara",

year = "2011",

month = may,

doi = "10.1007/s11664-011-1581-5",

language = "English",

volume = "40",

pages = "817--822",

journal = "Journal of Electronic Materials",

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T1 - Microgenerator using BiSbTe-Pt thermopile and Pt-Al 2O 3 ceramic combustor

AU - Shin, W.

AU - Nakashima, T.

AU - Nishibori, M.

AU - Itoh, T.

AU - Izu, N.

AU - Matsubara, I.

AU - Nakagawa, Y.

AU - Yamamoto, A.

AU - Obara, H.

PY - 2011/5

Y1 - 2011/5

N2 - The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi 0.3Sb 1.7Te 3 (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si 3N 4/SiO 2 multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 -3 W/mK 2 and 0.22 × 10 -3 W/mK 2, respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.

AB - The performance of a microcombustor thermoelectric generator device based on a thermopile using p-type Bi 0.3Sb 1.7Te 3 (BST) and n-type Pt films has been investigated. The BST films were prepared by two different methods-pulsed laser deposition (PLD) and sputter deposition-on Si 3N 4/SiO 2 multilayers on Si substrate. The ceramic catalyst combustor was patterned on the thermopile end on a thin membrane fabricated by back-side bulk etching of the silicon substrate. At 138°C the thermoelectric power factors of the PLD and sputter-deposited films were 3.6 × 10 -3 W/mK 2 and 0.22 × 10 -3 W/mK 2, respectively. The power from the generator with the sputter-deposited film was 0.343 μW, which was superior to that of the device with the PLD film, which provided 0.1 μW, for combustion of a 200 sccm flow of 3 v/v% hydrogen in air.

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JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

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ER -

Microgenerator using BiSbTe-Pt thermopile and Pt-Al ₂O ₃ ceramic combustor

Abstract

All Science Journal Classification (ASJC) codes

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