Abstract
We have developed multi-sensing artificial touch devices for the recognition of object properties and its surface situation. In this paper we present the fabrication of a thin-plate micro tactile sensor with two sensing functions of capacitance and inductance, and introduce the results of comparison of characteristics among various types of micro sensors for four typical test objects. The characteristics of sensor distinctly depend on each size of the sensors, the material of electrodes, and the depth of insulating layer in the sensor. Furthermore, by preparing the shielding layer in the sensor in the way of the fabrication process, it was found that the problem which occurred in miniaturizing the sensor would be solved.
| Original language | English |
|---|---|
| Pages (from-to) | 312-321 |
| Number of pages | 10 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3891 |
| Publication status | Published - Dec 1 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 Electronics and Structures for MEMS - Royal Pines Resort, Aust Duration: Oct 27 1999 → Oct 29 1999 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering