TY - GEN
T1 - Micro-refrigerator fabricated on silicon wafer
AU - Takata, Y.
AU - Sugahara, K.
AU - Tachikawa, T.
AU - Moroe, S.
AU - Kubota, H.
AU - Kohno, M.
AU - Takahashi, K.
AU - Koshimizu, T.
PY - 2007
Y1 - 2007
N2 - A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.
AB - A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.
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U2 - 10.1115/ICNMM2007-30108
DO - 10.1115/ICNMM2007-30108
M3 - Conference contribution
AN - SCOPUS:37249073323
SN - 079184272X
SN - 9780791842720
T3 - Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
SP - 749
EP - 754
BT - Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
T2 - 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
Y2 - 18 June 2007 through 20 June 2007
ER -