TY - GEN
T1 - Micro drilling into brittle materials by chemically plated diamond tools
AU - Park, H. K.
AU - Onikura, H.
AU - Ohnishi, O.
AU - Sajima, T.
AU - Sharifuddin, A.
PY - 2008
Y1 - 2008
N2 - The present research aims at efficient and high-quality micro drilling into brittle materials. Step feed drilling and helical feed drilling into silicon with an aspect ratio of about 1.5 were tried using chemically plated cylindrical diamond tools with a diameter of 120um. In step feed drilling significant tool wear and chip loading were observed on the end face and on the circumferential tip part, respectively. The tool life was restricted up to 30 holes and the hole diameter at the entrance was oversized. Drilling time was so long due to many steps of small feed. On the other hand, in helical feed drilling longer tool life was obtained than in step feed one. In helical feed drilling, a tool life of 400 holes was obtained at longest under a revolution radius of 0.02mm and a circumferential feed rate of 0.1mm/min. The tool life is about 13 times of that in step feed drilling. Under a circumferential feed rate of 0.3mm/min a chipping of 50um was observed at maximum on the entrance edge of 230th hole.
AB - The present research aims at efficient and high-quality micro drilling into brittle materials. Step feed drilling and helical feed drilling into silicon with an aspect ratio of about 1.5 were tried using chemically plated cylindrical diamond tools with a diameter of 120um. In step feed drilling significant tool wear and chip loading were observed on the end face and on the circumferential tip part, respectively. The tool life was restricted up to 30 holes and the hole diameter at the entrance was oversized. Drilling time was so long due to many steps of small feed. On the other hand, in helical feed drilling longer tool life was obtained than in step feed one. In helical feed drilling, a tool life of 400 holes was obtained at longest under a revolution radius of 0.02mm and a circumferential feed rate of 0.1mm/min. The tool life is about 13 times of that in step feed drilling. Under a circumferential feed rate of 0.3mm/min a chipping of 50um was observed at maximum on the entrance edge of 230th hole.
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M3 - Conference contribution
AN - SCOPUS:84908260770
T3 - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
SP - 465
EP - 468
BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
A2 - Van Brussel, Hendrik
A2 - Brinksmeier, E.
A2 - Spaan, H.
A2 - Burke, T.
PB - euspen
T2 - 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Y2 - 18 May 2008 through 22 May 2008
ER -