Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

Translated title of the contribution: Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

Hiroshi Kanno, Isao Tsunoda, Atsushi Kenjo, Taizoh Sadoh, Shinya Yamaguchi, Masanobu Miyao

Research output: Contribution to journal › Article › peer-review

Translated title of the contribution	Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator
Original language	Undefined/Unknown
Pages (from-to)	1933-1936
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	42
Issue number	1
Publication status	Published - Apr 30 2003

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@article{335adabe738e45c3bcd3bc9fb6fb8790,

title = "Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator",

author = "Hiroshi Kanno and Isao Tsunoda and Atsushi Kenjo and Taizoh Sadoh and Shinya Yamaguchi and Masanobu Miyao",

year = "2003",

month = apr,

day = "30",

language = "未定義/不明",

volume = "42",

pages = "1933--1936",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

publisher = "IOP Publishing Ltd.",

number = "1",

}

TY - JOUR

T1 - Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

AU - Kanno, Hiroshi

AU - Tsunoda, Isao

AU - Kenjo, Atsushi

AU - Sadoh, Taizoh

AU - Yamaguchi, Shinya

AU - Miyao, Masanobu

PY - 2003/4/30

Y1 - 2003/4/30

M3 - 学術誌

SN - 0021-4922

VL - 42

SP - 1933

EP - 1936

JO - Japanese Journal of Applied Physics, Part 2: Letters

JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 1

ER -