Abstract
Nanoscale pits were formed in the lignoceric acid monolayer utilizing the tip-monolayer surface interaction of an AFM. It was shown that the apparent shape of fabricated pits could be controlled as circular and rectangular shapes by choosing the scanning area. The distribution of rectangular pits based on the dimension and surface area density in the monolayer was successfully achieved.
| Original language | English |
|---|---|
| Pages (from-to) | 593-595 |
| Number of pages | 3 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 19 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2001 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering