Mechanical damage gettering effect in Si

Renshi Sawada, Toshiroh Karaki, Junji Watanabe

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


The gettering effectiveness of microdefects in Si wafer with mechanical damage introduced deliberately is investigated in relation to the degree of damage and the stress field around the damage. It is found that gettering action continues for 8 hours or more, although slower, when the damage is applied to a deep part of the wafer. This is due to the fact that the dislocations introduced deep in the wafer continue to serve as sinks for microdefect nuclei. The gettering effect is also greatly dependent on the microdefect density of a wafer.

Original languageEnglish
Pages (from-to)2097-2104
Number of pages8
JournalJapanese journal of applied physics
Issue number11
Publication statusPublished - Nov 1981
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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