TY - JOUR
T1 - Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes
AU - Michihata, Masaki
AU - Hayashi, Terutake
AU - Adachi, Atsushi
AU - Takaya, Yasuhiro
N1 - Funding Information:
This work was financially supported by the Mitutoyo Association for Science and Technology (MAST) and JSPS Grant-in-Aid for Challenging Exploratory Research (No. 24656102 ).
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs. The measurement results showed that the precision of the proposed method was ±1 nm.
AB - Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs. The measurement results showed that the precision of the proposed method was ±1 nm.
UR - http://www.scopus.com/inward/record.url?scp=84902533195&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84902533195&partnerID=8YFLogxK
U2 - 10.1016/j.cirp.2014.02.002
DO - 10.1016/j.cirp.2014.02.002
M3 - Article
AN - SCOPUS:84902533195
SN - 0007-8506
VL - 63
SP - 469
EP - 472
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -