Maskless gray scale lithography and its 3D microfluidic applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

Original languageEnglish
Pages (from-to)426-433
Number of pages8
JournalJournal of Robotics and Mechatronics
Issue number3
Publication statusPublished - Jun 2011
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General Computer Science
  • Electrical and Electronic Engineering


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