Low-loss On Chip CMOS Patterned Ground Coplanar Waveguide Transmission Line for Millimeter-wave Technology

In this paper, slow wave coplanar waveguide (CPW) transmission line is proposed, designed on patterned ground shield in 0.18μm CMOS technology for low-loss passive devices, components and interconnects in millimeter-wave region Patterned ground shield act to produce the slow-wave effect and they are usually kept below the metallization plane to reduce dielectric loss of the lossy silicon substrates Slow wave is very promising technique for reducing the size of passive components The strips of the patterned ground shield is constructed with shield strip length (SL) = shield strip spacing (SS) of 5μm These structures act to prevent the penetration of the electnc field into the silicon substrate It shows that the measured result of the patterned ground CPW produce lower attenuation loss compare to different stnps size CPW and conventional CPW, which is 0.619 dB/mm and phase constant of 2 574 rad/mm The resulted Quality factor (Q-factor) is 18 at 54GHz