Long-life micro-laser encoder

Renshi Sawada, Eiji Higurashi, Osamu Ohguchi, Yoshito Jin

Research output: Contribution to conferencePaperpeer-review

12 Citations (Scopus)


We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

Original languageEnglish
Number of pages5
Publication statusPublished - 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000


Conference13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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