@article{ccc0b736c77a457b9400871b95896150,
title = "Latest trends in ultra-precision polishing/chemical mechanical polishing (CMP) (Part 1) - Development and principle for polishing",
author = "Toshiro Doi and Syuhei Kurokawa and Osamu Ohnishi and Tsutomu Yamazaki",
year = "2010",
month = dec,
day = "1",
language = "English",
volume = "55",
pages = "803--808",
journal = "Toraibarojisuto/Journal of Japanese Society of Tribologists",
issn = "0915-1168",
publisher = "Japanese Society of Tribologists",
number = "11",
}