@inproceedings{0d92469f05af4894b14b0748115c239b,
title = "Lateral-liquid phase epitaxy of (101) Ge-on-insulator from Si template by metal-induced crystallization",
abstract = "We investigate metal-induced lateral crystallization (MILC) of Si on insulator to achieve (101) oriented Si films. Moreover, we demonstrate the lateral liquid phase epitaxy of high quality Ge(101) layers by using the MILC-Si films as crystal seed. This technique will be employed to realize high-speed thin-film transistors with Ge channel.",
author = "Masashi Kurosawa and Naoyuki Kawabata and Ryusuke Kato and Taizoh Sadoh and Masanobu Miyao",
year = "2011",
doi = "10.1149/1.3570776",
language = "English",
isbn = "9781566778664",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "51--54",
booktitle = "Advanced Semiconductor-on-Insulator Technology and Related Physics 15",
edition = "5",
}