Laser power dependence of particulate formation on pulse laser deposited films

Yukio Watanabe, M. Tanamura, S. Matsumoto, Y. Seki

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)


The density and the size of particulates in films laser-deposited at room temperature using various target materials were observed to depend strongly on the target material and the laser power density. However, loose universal relations between the deposition rates and the particulate density as well as the particulate size were found, where the latter corresponds approximately to the ratio of the laser power density to the ablation threshold. Furthermore, particulates consisting of only some of the target elements such as CuOx were found. Additionally, an acceptably high deposition rate was obtained by using halide and sulfide targets. These materials offer a possibility of deposition using a low power laser.

Original languageEnglish
Pages (from-to)2029-2036
Number of pages8
JournalJournal of Applied Physics
Issue number3
Publication statusPublished - 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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